Semiconductor Manufacturing Tour

Table of Contents

The Chip-Making Process

Making the Wafer

The Mask-Making Process

Epitaxy

Photolithography Process

Oxidation & Exposure

Etch & Strip

Diffusion & Implant

Deposition

Oxidation

Interconnect - Vias

Interconnect - Metallization

Chemical Mechanical Planarization

Interconnect - Layers

Inspection & Measurement

Yield Impact.......

Test, Assembly & Packaging

Wafer Probe or Test

Memory Repair

Assembly & Packaging

Package Test

The Chip-Making Process

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Slide 4 of 22

Notes:

    Crystalline or contaminate defects will kill the operation of an IC, so it is imperative that the silicon is ultra-pure. In order to create the best possible quality of silicon, a pure layer of silicon is grown on the raw wafer via an epitaxial growth process. This is known as the epi-layer.
    This layer is very thin - approximately 3 percent or less of the wafer thickness. As device complexity grows, the need for epi-wafers increases.

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