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Semiconductor Manufacturing Tour
Table of Contents
The Chip-Making Process
Making the Wafer
The Mask-Making Process
Epitaxy
Photolithography Process
Oxidation & Exposure
Etch & Strip
Diffusion & Implant
Deposition
Oxidation
Interconnect - Vias
Interconnect - Metallization
Chemical Mechanical Planarization
Interconnect - Layers
Inspection & Measurement
Yield Impact.......
Test, Assembly & Packaging
Wafer Probe or Test
Memory Repair
Assembly & Packaging
Package Test
The Chip-Making Process
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Slide 4 of 22
Notes:
Crystalline or contaminate defects will kill the operation of an IC, so it is imperative that the silicon is ultra-pure. In order to create the best possible quality of silicon, a pure layer of silicon is grown on the raw wafer via an epitaxial growth process. This is known as the epi-layer.
This layer is very thin - approximately 3 percent or less of the wafer thickness. As device complexity grows, the need for epi-wafers increases.
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