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Semiconductor Manufacturing Tour
Table of Contents
The Chip-Making Process
Making the Wafer
The Mask-Making Process
Epitaxy
Photolithography Process
Oxidation & Exposure
Etch & Strip
Diffusion & Implant
Deposition
Oxidation
Interconnect - Vias
Interconnect - Metallization
Chemical Mechanical Planarization
Interconnect - Layers
Inspection & Measurement
Yield Impact.......
Test, Assembly & Packaging
Wafer Probe or Test
Memory Repair
Assembly & Packaging
Package Test
The Chip-Making Process
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Slide 3 of 22
Notes:
The whole semiconductor manufacturing process hinges on the use of a photographic process to create the fine featured patterns of the integrated circuit. Each layer of the chip is defined by a specific mask, and there are 16 to 24 mask layers in each IC.
The mask is somewhat like a photographic negative, which is made by patterning a film of chromium on a pure quartz glass plate. These finished plates are called reticles. Reticles are manufactured by very sophisticated and expensive pattern generation equipment, which is driven from the chip design database. The patterns are formed on the chromium plated quartz plated by removing the chromium with either laser or electron-beam driven tools.
As transistor features are reduced, more components are placed on each chip, requiring larger, more complex patterns to be drawn. This all takes longer to write the masks. Each new design or die shrink requires new mask tooling, so this segment is driven by new product acceleration.
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